JPS6142906Y2 - - Google Patents

Info

Publication number
JPS6142906Y2
JPS6142906Y2 JP2348582U JP2348582U JPS6142906Y2 JP S6142906 Y2 JPS6142906 Y2 JP S6142906Y2 JP 2348582 U JP2348582 U JP 2348582U JP 2348582 U JP2348582 U JP 2348582U JP S6142906 Y2 JPS6142906 Y2 JP S6142906Y2
Authority
JP
Japan
Prior art keywords
chamber
cleaning liquid
cleaning
spray
contaminants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2348582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58124470U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2348582U priority Critical patent/JPS58124470U/ja
Publication of JPS58124470U publication Critical patent/JPS58124470U/ja
Application granted granted Critical
Publication of JPS6142906Y2 publication Critical patent/JPS6142906Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP2348582U 1982-02-19 1982-02-19 スプレ−式金属表面洗浄装置 Granted JPS58124470U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2348582U JPS58124470U (ja) 1982-02-19 1982-02-19 スプレ−式金属表面洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2348582U JPS58124470U (ja) 1982-02-19 1982-02-19 スプレ−式金属表面洗浄装置

Publications (2)

Publication Number Publication Date
JPS58124470U JPS58124470U (ja) 1983-08-24
JPS6142906Y2 true JPS6142906Y2 (en]) 1986-12-05

Family

ID=30035521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2348582U Granted JPS58124470U (ja) 1982-02-19 1982-02-19 スプレ−式金属表面洗浄装置

Country Status (1)

Country Link
JP (1) JPS58124470U (en])

Also Published As

Publication number Publication date
JPS58124470U (ja) 1983-08-24

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